Thin Solid Films, Vol.369, No.1-2, 297-305, 2000
Si/SiGe/Si pMOS performance - alloy scattering and other considerations
Charge-carrier scattering in pseudomorphic p-channel Si/SiGe/Si heterostructures is reviewed. It is argued that current room-temperature field-effect device performance is limited by materials quality, particularly interface roughness and compositional inhomogeneity, rather than random alloy scattering. The way ahead is discussed.