화학공학소재연구정보센터
Thin Solid Films, Vol.350, No.1-2, 119-123, 1999
Epitaxial and polycrystalline BaFe12O19 thin films grown by chemical vapour deposition
Epitaxial and polycrystalline barium hexaferrite BaFe12O19 thin films were prepared by metalorganic chemical Vapour deposition (MOCVD). Films were grown by a liquid MOCVD technique which aim is to control precisely the precursor vapour pressures. Two kinds of substrates were used: sapphire (001) and silicon thermally oxidized. On Si/SiO2 films are polycrystalline and the magnetization is isotropic. On Al2O3 (001), structural studies reveal the films to be predominantly single phase, well crystallized without annealing procedure and with the c-axis perpendicular to the film plane; epitaxial relationships between the film and the substrate were determined. The magnetic parameters, deduced from vibrating sample magnetometer measurements, show a high dependence of the magnetization with the orientation of the field with respect to the surface of the film.