화학공학소재연구정보센터
Thin Solid Films, Vol.340, No.1-2, 132-136, 1999
Total dose radiation effects of Au/PbZr0.52Ti0.48O3/YBa2Cu3O7-delta capacitors
PbZr0.52Ti0.48O3/YBa2Cu3O7-delta (PZT/YBCO) thin films have been fabricated on Y2O3 stabilized zirconate (YSZ) substrates by a pulsed excimer laser deposition (PLD) method. In order to investigate total dose radiation effects on the Au/PZT/YBCO ferroelectric capacitor, the capacitance-voltage (C-V) curves and the retained polarization property of the capacitor have been measured before and after gamma-ray irradiation. The results showed that, with an increased total dose, the retained polarization and the dielectric constant decreased, but the coercive field drifted towards positive voltage direction. This is caused by charges trapped by defects in the PZT capacitor during irradiation.