Oxidation of Cl-modified Ag(111) under UHV conditions was investigated using AES, ISS and HREELS. The results showed that Cl-modified Ag(111) can be easily oxidized at 550 K by 1 x 10(-6) mbar oxygen which was also heated to 550 K. With HREELS two fundamental vibrations at 600 and 1000 cm-1 were detected for silver oxide and the multiple losses and combination excitations as well. Ethylene adsorption on the oxide was analyzed by HREELS. Surface hydroxyl species was formed at 230 K and stable to above 300 K, which is attributed to silver oxide. Ethylidyne was suggested to form concurrently with hydroxyl species.