Rate coefficients for the depletion of ground-state oxygen atoms by CHF3 have been measured using a hie, temperature photochemistry (HTP) reactor. The O atoms were generated by the vacuum ultraviolet (VUV) flash photolysis of either SO2, O-2, Or CO2, and their relative concentrations were monitored by resonance fluorescence. The data are best fitted by the expression k(630-940 K) = 2.5 X 10(-11) exp(-7236 K/T) cm(3) molecule(-1) s(-1). The data are contiguous with those from an earlier laser-photolysis shock-tube study for temperatures ranging from 960 to 1330 K. A fit to the combined data yields the recommendation k(630-1330 K) = 5.1 X 10(-11) exp(-9536 K/T) cm(3) molecule(-1) s(-1), with 2 sigma precision levels varying from +/-8 and +/- 22% and corresponding suggested accuracy levels of +/- 22 to +/- 29%. Transition-state theory predictions, made using input data from a literature ab initio study, are in excellent agreement with this recommendation over the entire temperature domain.