화학공학소재연구정보센터
Electrochimica Acta, Vol.45, No.28, 4645-4653, 2000
The influence of oxidizing agents on etching and passivation of silicon in KOH solution
The effect of oxidizing agents (MnO4- and CrO42-) on the electrochemistry, etching kinetics and etching morphology of p-type silicon in KOH solution has been studied. Electrochemical results show that reduction of MnO4- occurs via hole injection into the valence band of oxide-covered silicon, while the rate of cathodic reduction of CrO42- is very low. The current density measured with MnO4- at negative potential drops to a low value when the surface oxide is removed and chemical etching starts. It is suggested that during etching, a surface intermediate is formed which can interact chemically with the oxidizing agents. This is confirmed by optical absorption measurements. At potentials positive with respect to the open circuit potential both oxidizing agents modify the formation of sur face oxide. In addition, both oxidizing agents influence the surface morphology by 'preventing' pyramid formation. These results are discussed in terms of a model previously suggested for chemical etching of silicon in alkaline solutions.