화학공학소재연구정보센터
Journal of Materials Science, Vol.35, No.19, 4995-4999, 2000
Effects of ultrasound on perovskite phase developments, microstructures, and dielectric properties of sol-gel-processed PbTiO3 thin films
PbTiO3 thin films were prepared by spin coating of untreated and sonicated sol (from Pb-Ti stock solution) on Si substrates. The films were fired at different temperatures and were analyzed by scanning electron microscopy, X-ray diffraction and atomic force microscopy. Dried gel and thin films prepared through the two different processing routes were compared in terms of phase developments, microstructures, and dielectric properties. Films prepared from the sonicated sol were found to be superior than those from the untreated sol.