The energetics of copper deposition based on Cu(I) precursors are clearly delineated. There are two surface reactions that can he the rate-determining step. As the temperature increases, the rate-determining step changes from disproportionation reaction to dissociation reaction and then to the adsorption step or mass-transfer limited regime. The energetics as represented by the three distinct regions in the form of activation energy can represent experimental data in a unified way.