Possible interactions between nonfluorinated poly(arylether) thin films and the recently developed electroless Cu deposition solution are investigated. The results show that there is no chemical reaction between this low-dielectric-constant polymer and the electroless Cu deposition solution. However, a significant change in thickness as well as refractive index is induced by the electroless solution conditions. It is demonstrated that higher temperatures can alleviate the electroless Cu solution-induced effects as far as the glass transition temperature, the coefficient of thermal expansion, and refractive index are concerned.