Thin Solid Films, Vol.379, No.1-2, 15-22, 2000
Sensitivity analysis of ellipsometry applied to uniaxial optical films
A quantitative study of the sensitivity of ellipsometry applied to uniaxial optical films is reported. A general formalism for optimization of the sensitivity for a layered sample has been developed which is based on a combined variation of wavelength and angle of incidence of the probe beam. For the air/oligophenylenevinylene(OPV5)/crystalline silicon system a numerical calculation is performed to determine sensitivity of ellipsometric angles and correlation of variables.