Ceramic nanometric multilayer structures of nanostructured particles of SiCx:H layers and amorphous Si films were obtained by chemical vapour deposition using modulated rf plasma. This technology has been extensively used for producing ceramic Si-based nanoparticles (SiCxNy) with unique characteristics including spherical morphology, composition and controlled ultrafine particle size in the range 2-100 nm. Hybrid multilayer nanostructures of ceramic coatings containing Si and SiC were produced to study their structural, mechanical and surface properties. Low densities of crystalline nanoparticles were embedded in a-Si matrix during the growth of these structures and they were intercalated between amorphous Si layers. The phase structure, microstructure and morphology of the hybrid multilayered films were examined by transmission electron microscopy and selected area electron diffraction, which revealed the presence and distribution of the nanoparticles in the multilayered structure of the films. The hardness and Young's modulus were measured by the nanoindentation technique, and the wear properties were evaluated using an improved pin-on-disc system. These results showed that the mechanical properties of the films (hardness, friction, propagation of cracks and wear resistance) were notably enhanced by the presence of the nanoparticles. Potential applications of these coatings based on ceramic multilayers include the production of tough and hard coatings, protective and wear-resistant coatings for mechanical tools, gears and mechanical parts, optical surfaces and fibres, corrosion and high temperature-resistant coatings, as well as inorganic membranes, buffer layers for heterogeneous coatings, and coatings with anisotropic properties.