화학공학소재연구정보센터
Solid State Ionics, Vol.136-137, 921-926, 2000
Preparation of oxide thin films by controlled diffusion of oxygen atoms
A new method for preparing thin oxide films is described. It makes use of slow diffusion of oxygen through a permeable layer, towards the metal to be oxidized. We have used this method to oxidize copper. The permeable layer is a dense silver film. The formation of the oxide was followed in situ in an attempt to measure the resistance of the cell.