Li1-xNi1+xO2 and LiCoO2 films as cathodes for lithium rechargeable microbatteries were fabricated in a concentrated LiOH solution at 20-200 degreesC using different Soft Solution-Processing methods. While LiCoO2 films can be obtained by a purely hydrothermal reaction, a supplementary electrochemical charge with the same hydrothermal conditions is necessary to produce Li1-xNi1+xO2 films. A film formation mechanism study elucidated the necessity of such different activation methods for the preparation of Li1-xNi1+xO2 and LiCoO2 films. (C) 2000 Elsevier Science B.V. All rights reserved.