화학공학소재연구정보센터
Materials Science Forum, Vol.338-3, 461-464, 2000
X-ray topographic study of SiC crystal at high temperature
We have developed an instrument for in-situ X-ray topography during crystal growth of silicon carbide (SiC), A vertical X-ray goniometer is combined with a furnace for sublimation growth. A high-power X-ray source and a TV imaging system using a CCD camera make possible to display the behaviors of defects in SiC crystal inside crucible. For a demonstration of the developed instrument, we show the topographs of a SiC crystal at high temperature. The topographs show distinct deformations developing with increasing temperature.