Materials Science Forum, Vol.338-3, 31-34, 2000
Global numerical simulation of heat and mass transfer during SiC bulk crystal PVT growth
Modeling results of a global heat and mass transfer analysis of the SIC bulk growth process in an inductively heated PVT reactor are presented. The modeling approach is summarized and its reliability is shown by comparing experimental data to simulation results. The temporal evolution of the temperature gradients at the crystal surface during the growth process is analyzed and related to the radial growth rate distribution. The species fluxes at the surface of the source are investigated.
Keywords:global heat transfer;mass transfer;numerical modeling;physical vapor transport;SiC bulk growth