화학공학소재연구정보센터
Thin Solid Films, Vol.359, No.2, 141-145, 2000
Structure and in-depth concentrations in excimer laser irradiated Pb-Co codeposited films
Pb100-xCox, x = 0, 9, 25, 32 and 36 at.% films composed of mutually immiscible metals were codeposited by two electron beam sources in UHV system at the SiO2/Si substrate temperature of 40 degrees C. The samples were processed by XeCl excimer laser irradiation at the fluences F less than or equal to 0.2 J/cm(2) and number of pulses n = 1, 10, 100 and 1000. The samples were analyzed by X-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS), EDAX/SEM and by resistometry. In the films fcc Pb was found. Neither fcc nor hcp Co were detected. From RES analyses it follows that in Pb-Co films Co segregates at the surface, even in the as-deposited state. This distribution of concentration remains almost unchanged after laser irradiation. The porosity of Pb-Co films was considerably suppressed by laser irradiation in the melting regime.