화학공학소재연구정보센터
Thin Solid Films, Vol.357, No.2, 144-150, 1999
Deposition of diamond-like films upon laser irradiation of the interface of a transparent substrate with liquid aromatic hydrocarbons
Amorphous diamond films are deposited on transparent substrates upon exposure of its interface with liquid hydrocarbons (C6H5CH3, C6H6, and C6H5CH(CH3)(2)) to pulsed visible radiation of a Cu vapor laser (lambda = 510.6 nm). The X-ray Auger electron spectroscopy (XAES), reflection high energy electron diffraction (RHEED), scanning electron microscopy (SEM), profilometry, optical spectroscopy, and Raman analysis at lambda = 632.8 nm excitation wavelength are employed to characterize the deposited films. The sp(3) fraction in deposited films amounts to 60-70% and depends on the precursor. The films show excellent adherence, are transparent in the visible and have microhardness of 50-70 GPa, as measured with a nanoindentor. The sp3 bond fraction in deposited films increases with addition to the liquid hydrocarbon a suspension of diamond nanoparticles.