Epitaxial perovskite magnetoresistive La0.7Ca0.3MnO3 (LCMO) films have been successfully grown on SrTiO3(STO)/TiN buffered (100)Si substrates by pulsed laser deposition method. The structural quality of the LCMO/STO/TiN/Si heterostructure was characterized by a four-circle X-ray diffractometer. The crystallinity of the epitaxial layers was found to improve with increased substrate temperature. An epitaxial relationship of [100]LCMO//[100]STO//[100]TiN//[100]Si was obtained at a deposition temperature of 700 degrees C. The electrical properties and the magnetoresistance ratio (MR) of the LCMO films were measured by a standard four-probe technique. A maximum MR (MR = Delta R-B=1.2 T/R-B=0) Of -50% was observed at 116 K in the as-grown LCMO films.