화학공학소재연구정보센터
Thin Solid Films, Vol.354, No.1-2, 1-4, 1999
Roughness and critical exponents analysis of diamond films by AFM imaging
We have synthesized diamond films by plasma assisted chemical vapor deposition on silicon substrates. The roughness and dynamic critical exponents of these films have been measured using an Atomic Force Microscope. Our experimental results are compared with the theoretical predictions of Kardar et al. [9] (Phys. Rev. Lett. 56 (1986) 889.