Y1Ba2Cu3Ox films, ranging in thickness from 1.5 to 7.5 mu m, on (3100) YSZ substrates were fabricated by spraying a suspension consisting of YBCO powders. The films were sintered at 940 degrees C for 2 min under Rowing argon and then exposed to oxygen. It was found that the spraying conditions such as the flow rate of carrier gas and dhe aperture of spray nozzle had a great influence on both the mechanical and the superconducting properties of YBCO films. The maximum critical current density J(c) (77 K) of about 4200 A cm(-2) was obtained by reducing the droplet size.