Thin Solid Films, Vol.324, No.1-2, 134-140, 1998
Structural and optical properties of Sr1-xBaxTiO3 thin films prepared by rf sputtering
Sr1-xBaxTiO3 thin films (0 less than or equal to x less than or equal to 1) were deposited at T = 723 K by the rf sputtering method from targets comprised of ceramic, SrTiO3-BaTiO3 mosaic. The influence of barium content and the post-deposition annealing at T = 1173 K on the structural and optical properties were studied. It has been found that the crystallinity of the as-sputtered (at T = 723 K) thin films decrease with the increase of Ba content (x). The perovskite structure with preferred orientation (changing from(1 1 0) for x = 0 to (h 0 0) for x = 1) was detected for the post-deposition annealed (at T = 1173 K) Sr1-xBaxTiO3 thin films. The annealing of Sr1-xBaxTiO3 thin films affects the optical transmission spectra and absorption edge position. The observed changes are the strongest in case of BaTiO3 films and those of related compositions. The refractive index derived for the well-developed perovskite structure was found to be independent on the chemical composition (x) and was n = 2.1, for h = 1.55 mu m.