화학공학소재연구정보센터
Thin Solid Films, Vol.317, No.1-2, 393-396, 1998
Deposition of hydroxyapatite thin films by excimer laser ablation
The influence of the pressure of a sole water atmosphere during the pulsed laser deposition of hydroxyapatite thin films on Ti-6Al-4V substrates has been studied. The rest of the technological parameters involved in the process have been fixed near the conditions where the best crystalline coatings are obtained. The pressure of the water atmosphere has been varied between 0.15 and 1.5 mbar. The films properties have been analysed by means of XRD, SEM, FT-IR spectroscopy and SIMS. An optimal region, in order to obtain thin films of highly crystalline hydroxyapatite, has been found near 0.5 mbar for the two excimer laser wavelengths (193 nm and 248 nm) used in this study. These films have a preferential orientation in the (100) direction.