화학공학소재연구정보센터
Thin Solid Films, Vol.310, No.1-2, 303-309, 1997
Structures and vapor-sorption characteristics of sputtered polychlorotrifluoroethylene films treated by hydrogen-plasma
Hydrogen-plasma treatment of the polychlorotrifluoroethylene (PCTFE) film produced by radio-frequency sputtering induces considerable elimination of halogen (fluorine and chlorine) atoms. This dehalogenation produces some noteworthy structural features : surface densification (crosslinks), trapped radicals, and incorporation of oxygen in the carbon networks. These structural changes modify the vapor-sorption properties of the sputtered PCTFE film, producing a molecular-sieving effect and enhancing the polar character of solubility properties of organic vapors.