화학공학소재연구정보센터
Thin Solid Films, Vol.306, No.1, 119-123, 1997
Study of the Adhesion Between A-CH Films and Ta6V Substrates by Electron-Induced X-Ray-Emission Spectroscopy (Exes)
The Ti 3d valence states have been analyzed by electron-induced soft X-ray emission spectroscopy (EXES) in the TA6V bulk alloy and at a-CH/TA6V and a-SiOxCyH/TA6V interfaces. These states stem from metallic titanium in both cases. In contrast, EXES analysis shows that aluminum is in an oxide environment. Both aluminium compounds have a different behaviour depending on the presence of a-SiOxC(y)H in contact with the alloy. Adherence of a-CH films on the TA6V alloy can be explained from physicochemical interactions.