Thin Solid Films, Vol.304, No.1-2, 339-343, 1997
Co Sensing Properties of SnO2 Thin-Films Prepared by the Sol-Gel Process
Undoped and Pd-doped SnO2-based thin film chemical sensors have been developed by means of the sol-gel technique. The prepared films were sensitive to CO gas as demonstrated by a change in electrical conductivity. The temperature dependence of the resistance change and response and recovery times have been measured. An improvement of the sensitivity and a lower operating temperature were observed in Pd-modified films.
Keywords:SEMICONDUCTOR GAS SENSORS;TIN OXIDE