With the advent of synchrotron radiation sources, interest has increased in the development of microfocusing optics. In order to develop high performance multilayer zone plate (ZP) for use in the hard X-ray region, Ag/C concentric multilayers were prepared using various deposition parameters. A dependence of the multilayer interface (zone) configuration on the Ar gas pressure was observed : the multilayer prepared at the lowest Ar gas pressure had the smoothest zones. From the focusing test of the ZP, a submicrometre hard X-ray microbeam was realized.