Structural features of Fe films and Fe-based multilayers with Ag, Cu, Cr and Mo sublayers were investigated; we focused on structural features such as the asymmetric shape and the alignment of the columns in the film plane. As a result, common structural features were found to be related to factors such as the substrate temperatures, the melting points of the elements concerned with surface diffusion, and the incident directions of the sputtered particles to the substrate originating from the arrangement of the targets. In the case of multilayers, such structural features were found to vary depending on combinations of the metal elements and the thickness ratios of the constituent sublayers.