화학공학소재연구정보센터
Thin Solid Films, Vol.270, No.1-2, 270-274, 1995
A Method for Elastic-Modulus Measurements of Magnetron-Sputtered Thin-Films Dedicated to Mechanical Applications
Mechanical properties of thin films may highly differ from those of chemically identical bulk materials. Their knowledge is of paramount importance for coatings manufacturers. In this paper, attention is paid on Young’s modulus measurements of PVD magnetron sputtered thin films on metallic substrates. The method is based on the three-point bending test of partially coated stainless steel or titanium alloy substrates. After derivation of the corresponding equations, the method and its accuracy according to qualification tests are first described. Results are then presented for coatings as varied as C, W, Cr(C), and TiN with thicknesses spanning 0.5-10 mu m, and deposited under different sputtering conditions. It is first seen that the Young’s modulus highly depends on the deposition parameters, varying from the bulk values down to the fourth of this value. In the case of reactive sputtering, the evolution of the modulus with the gas flow is also presented and a correlation with phases or microstructure is observed. It is finally concluded that this kind of test, owing to its simplicity and its reliability, may help on a scientific point of view towards understanding the influence of morphology on mechanical properties, and on a practical basis for ensuring a control quality reference when performed systematically after deposition. Some foreseen extensions of this work to adhesion measurements will be mentioned shortly.