Examples for applications of an atomic force microscope (AFM) in indentation testing are discussed. Scanning of the diamond indenter tips provided information on shape and wear, which could be used to consider the influence of tip blunting on hardness results during depth-recording testing. In comparison, hardness was also determined from AFM images of the residual indentations which reduced methodical problems inherent in depth recording. In this case hardness values of aluminium bond pads could be correlated with the surface structure revealed by the AFM simultaneously.