화학공학소재연구정보센터
Thin Solid Films, Vol.255, No.1-2, 310-312, 1995
Realization of Porous Silicon Membranes for Gas Sensor Applications
In this paper we report on the elaboration of porous silicon membranes for gas sensor applications. We attempted to replace the Teflon membrane of an oxygen sensor by a porous silicon membrane. The sensor was originally designed to measure the concentration of oxygen dissolved in aqueous solutions and had to be slightly modified. Diffusion times in the range of 10 min have been found.