화학공학소재연구정보센터
Thin Solid Films, Vol.255, No.1-2, 63-66, 1995
Electrodeposition of Metals into Porous Silicon
The electroless and cathodic electrodeposition of metals (Au, Cu, Ni) into porous silicon (PS) is studied. The electrochemically modified PS layers are analysed by X-ray photoelectron spectroscopy and sputter depth profiling. The electroless deposition oxidizes PS simultaneously. For this reaction a new concept of injection current multiplication is proposed. After cathodic metal deposition the pores are filled with metal quantitatively without oxidation of PS.