화학공학소재연구정보센터
Thin Solid Films, Vol.251, No.1, 19-22, 1994
Tin Dioxide Thin-Films Prepared by Photochemical Vapor-Deposition from Tin(II) Acetate
Tin dioxide thin films were prepared by a direct photochemical vapour deposition method. The raw material was tin(II) acetate. A 6 W low-pressure mercury lamp was used as a light source. At a substrate temperature above 150-degrees-C, the thin film was obtained in air with a deposition rate which is higher than that for thermal chemical vapour deposition. UV irradiation without premixing oxygen gas improves crystallinity, suppressing the intrusion of carbon contamination.