화학공학소재연구정보센터
Thin Solid Films, Vol.245, No.1-2, 211-214, 1994
Iron-Oxide Thin-Film Gas Sensor
A Fe2O3-based thin film gas sensor was made by cathodic sputtering from a pressed oxide target. A mixture of Ar-O was used as a sputtering gas. It was confirmed by X-ray diffraction that the iron oxide film consisted of the alpha-Fe2O3 phase only. The sensor is sensitive to many organic vapours and hydrogen without any noble metal catalyst. The working temperature of 350 400-degrees-C is recommended for a sufficiently fast response of the sensor. No sensitivity to methane was found up to 0.5 vol.% at the temperature of 400-degrees-C.