화학공학소재연구정보센터
Thin Solid Films, Vol.241, No.1-2, 129-133, 1994
Time-Resolved Measurements of Plume Shielding During ArF Laser-Ablation of Silicon
A new method is proposed for the processing of experimental data from reflectivity measurements from a target-plume system. This method gives the possibility of finding the order of laser radiation absorption in the laser induced plume during the laser-target interaction time. We show that three-photon absorption is a main mechanism of plume shielding in the case of crystalline silicon ablation by ArF (lambda = 193 nm) laser.