The breakdown of titanium oxide films anodically grown on Ti electrode under galvanostatic control in 0.5 M KOH solution by a hydrothermal-electrochemical method at the temperature of 150 degrees C has been investigated. The breakdown of titanium oxide films play an important role in the formation of barium titanate (BT) film. The kinetic studies on barium titanate films hydrothermal-electrochemic ally fabricated in 0.25 TW Ba(OH), solution at 150 degrees C show that the BT films could grow on both the Ti-oxide/BT interface and the BT/solution interface. AFM images show that the morphology and grain size of the BT films mainly depends on the dissolution-recrystallization process of the BT film. A schematic procedures have been proposed to interpret the mechanism of the BT formation extensively.