The fabrication and operation of a new type of amperometric linear response oxygen sensor is demonstrated that utilizes a 16 mu m thick, dense Tb-YSZ film of composition Y0.2Tb0.24Zr0.56O2-y as a solid state chemical oxygen diffusion barrier. The device exhibits a near linear response between 750 and 850 degrees C between 0.2 and 4.5% O-2 in nitrogen. The effective linear range of operation at 800 degrees C is extended to above 8.0% O-2 With the application of albite (Na-Al-Si-O) glass to limit leakage at the edges (gas-substrate-diffusion barrier interface) of the device. Thin film high temperature cyclic voltammetry performed on Tb-YSZ films of similar stoichiometry indicate thermodynamic stability to below 10(-30) atm pO(2) at 750 degrees C. The initial performance of this device taken together with the inherent chemical stability of the diffusion barrier-suggests that devices of this type may be suitable for use as control sensors for lean-burn internal combustion engines.