Single phase SrTiO3 thin films were prepared from strontium and titanium oxide bisdipivaloylmethanate (dpm) by a MOCVD-derived spray pyrolysis method. First, the deposition behaviour of SrO-SrCO3 films obtained from Sr(dpm)(2) and that of TiO2 films from TiO(dpm)(2) were separately studied, in order to optimize the conditions to deposit SrTiO3 films. The films were deposited in a wide temperature range (600-900 degrees C) onto different substrates and characterized by X-ray powder diffraction, scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS).