Electrostatic spray pyrolysis (ESP), or electrospraying, a rather novel technique to generate aerosols, has been used for thin film deposition of oxidic ceramic materials. Yttrium stabilized zirconia (YSZ) and barium cerate (BaCeO3), which are utilized as solid electrolyte materials for solid oxide fuel cells (SOFCs), are synthesized using electrospraying. YSZ can be obtained directly after spraying, whereas BaCeO3 needs to be annealed.