Solar Energy Materials and Solar Cells, Vol.52, No.3, 231-238, 1998
Use of linear magnetrons for the fabrication of aluminum first-surface solar mirrors
Aluminum first-surface solar mirrors by sputtering processes using linear magnetrons are presented for 30 x 60 cm soda lime substrate areas. The optimum parameters are Al target-glass substrate distance 130 mm, Al evaporation pressure 6-7 x 10(-4) Torr for argon plasma, aluminum evaporation rate similar to 1.5 Angstrom/s (similar to 1000 Angstrom thickness); SiO2 target-glass substrate distance 13 cm, SiO2 evaporation pressure 2-3 x 10(-3) Torr for argon-oxygen plasma and SiO2 evaporation rate similar to 1.3 Angstrom/s (similar to 3200 Angstrom thickness).