In this report, a simple WO3 dry lithiation is proposed for fabrication of all-solid-state electrochromic devices and characterized completely by X-ray photoelectron spectroscopy and electrochemical method. Lithiation is carried out by electron-beam evaporation of metal lithium, and the lithiated films have different components and electrochromic properties with different lithiation degrees. It is found that if Li/W ratio is less than 0.25, tungsten bronze LixWO3 is formed and the lithiated films have good reversibility and coloration efficiency, which is similar to the WO3 films lithiated by wet method. Finally, a lithium-based all-solid-state electrochromic device with proper lithiation degree is fabricated using this dry method.