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Polymer, Vol.35, No.14, 3131-3132, 1994
Functionalization of Polysilsesquioxanes
New polysilsesquioxanes are prepared by incorporating tetrahydropyranyl moieties into silsesquioxanes. These polymers, which are soluble in organic solvents, are synthesized by means of HCl-catalysed reactions.
Keywords:ELECTRON-BEAM LITHOGRAPHY;CHEMICAL AMPLIFICATION;NEGATIVE-RESIST;CONDENSATION;SILICON;SYSTEMS