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Plasma Chemistry and Plasma Processing, Vol.16, No.2, 153-171, 1996
Electron-Energy Distribution-Functions and Rate and Transport-Coefficients of H-2/H/CH4 Reactive Plasmas for Diamond Film Deposition
Electron energy distribution functions (eedf) and rate and transport coefficients for H-2/H/CH4 mixtures have been calculated-by solving a stationary Boltzmann equation as a function of reduced electric field E/N, of molar fraction, and of different different concentrations of electronically excited states. Superelastic electronic collisions superimpose structures to eedf especially for E/N values<40 Td.