화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.15, No.1, 109-121, 1995
Comparison of Reaction-Rates for Helium Plasmas Calculated Using Nonequilibrium and Equilibrium Electron-Energy Distribution-Functions
The electron energy distribution functions for helium plasmas have been calculated using Boltzmann equation. Three characteristic temperatures of these distribution functions have been determined (from mean energy, the Einstein formula, and the logarithmic slope). The reaction rates for nonequilibrium and three equilibrium (corresponding to these three characteristic temperatures) distribution functions have been calculated and compared. We have found that the use of equilibrium values for reaction rates of processes going from the ground state can lead to great errors in results, the use of equilibrium values for processes going from higher levels is possible for higher reduced electric fields, and there is no problem with using equilibrium values for superelastic processes.