화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.14, No.1, 1-13, 1994
A Simple Approach to Treat Anisotropic Elastic Collisions in Monte-Carlo Calculations of the Electron-Energy Distribution Function in Cold-Plasmas
A simplified method allowing one to treat anisotropic electron-heavy species elastic scattering in Monte Carlo models of gas discharges with the proper value for collision frequency is proposed. The method is applied to an electric discharge in a Ne/Xe/HCl mixture, and the results are compared with the solution of the two-term expansion of the Boltzmann equation under the same conditions. Methods for reduction of computational time in Monte Carlo codes and the use of the Monte Carlo flux method are also discussed.