화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.13, No.4, 655-671, 1993
Semiempirical Method for Extracting Electron-Molecule Cross-Sections from Experimental-Data - CF4 as an Example
A semiempirical method is described for calculating electron-molecule interaction potential, electron density, and elastic and vibrational inelastic cross sections using experimental data. CF4 was considered as an example. Experimental data from IR and Raman spectra, molecular properly calculations (dipole matrix elements, polarizability, distance between atoms in molecule), beam measurements of total. momentum transfer, and differential cross sections, and swarm data (diffusion and drift velocity) are used for extracting the interaction potential, the molecule electron density, and the differential cross sections. Electron energy distribution functions, drift velocity, and characteristic energy are calculated with the obtained differential e-CF4 cross sections for Ar/CF4 mixtures.