화학공학소재연구정보센터
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, Vol.294, 35-38, 1997
Preparation of Conducting Polymer Thin-Films by Excimer-Laser Chemical-Vapor-Deposition
Organic thin films with laser induced periodic structures (LIPS) are prepared by excimer laser chemical vapor deposition (ELCVD) of two kinds of aromatic compounds, p-dichlorobenzene(DCB) and 5,5’-dibromo-2,2’-bithiophene (DBBT) with 193nm (ArF) and 308nm (XeCl) beams, respectively. The conductivity of the film from DBBT with 308nm beam has reached to 1x10(-2) Scm(-1) by doping with iodine after the ELCVD process.