Under fixed-bed flow conditions, silane, diethoxysilane, and tetraethoxysilane are formed by the disproportionation of triethoxysilane over a KF/Al2O3 or a heat-treated hydrotalcite catalyst. The reactions at 393 K give preponderantly either silane with 17-21% yields or diethoxysilane with 5-10% yields. The preponderance depends on the contact time and the amount of KF loaded on Al2O3.