Pb(Fe1/2Nb1/2)O-3 (PFN) films on Pt/Ti/SiO2/Si(100) substrates were fabricated by pulsed laser deposition (PLD), and Pt/Ti/SiO2/Si(100) were formed by the deposition of Pt and Ti on SiO2/Si(100) using ion-beam sputtering technique. PFN/Pt/Ti/SiO2/Si(100) multilayer structure has been studied using Auger electron spectroscopy (AES), X-ray diffraction (XRD), and field emission scanning electron microscopy (FE-SEM). The diffusion of platinum into PFN film and Ti layer has been observed. The formation of a TiO2 phase was confirmed.