화학공학소재연구정보센터
Materials Research Bulletin, Vol.32, No.6, 737-742, 1997
Deposition of Ag0.5Cu0.5Inte2 Thin-Films Using a Stepwise Evaporation Method
Thin films of Ag(0.5)Cu(0.5)LnTe(2) are deposited on substrates held at different temperatures using a stepwise evaporation process. The film growth was done by feeding pre-reacted Ag0.5Cu0.5InTe2 powder in small steps (a few mg per step) to an unheated tungsten boat and then evaporating the material rapidly to completion. This process has been repeated to get films of sufficient thickness. Structural characterization using transmission electron microscopy has revealed that films deposited at temperatures as low as 100 degrees C are polycrystalline and single phase. Analysis of film composition using energy dispersive analysis of X-rays has shown that the films are nearly stoichiometric.