Journal of Vacuum Science & Technology B, Vol.18, No.1, 317-320, 2000
Wavelength-independent optical lithography
We propose and demonstrate a multiple exposure lithographic technique with resolution limited by processing and not by exposure wavelength. We implement this technique using binary masks and conventional illumination at lambda(e) = 248 nm and show that various types of patterns of dimension up to lambda(e)/10 can be printed.